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If optional attributes
Related Information 1 provides a table of typical values
It includes generic overlay target design methodology
It oxidizes readily and rapidly to release hydrogen chloride
SEMI E87 — Specification for Carrier Management
D04200 - SEMI D42 - Specification for Ultra Large Size Mask Substrate Case Revision:SEMI D42-0421 - Current If optional attributesThis Standard defines the specification for ultra large size substrate case used in flat panel display (FPD) manufacturing process. The specification defined by this Standard is applicable to the case for containing substrate materials used in FPD mask manufacturing process. The objective substrate range for the mask size defined by this Standard is 850 1,200 mm and more. The automatic handling of the mask substrate becomes indispensable, in